Brooks Instrument GF100 Serie Manual De Instrucciones página 61

Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
Table 5-4 GF101, GF121 & GF126 Series Product Description Code
Code Description Code Description
Code Description Code Description Code Description
I. I. I. I. I. Base Model Code
II. II. II. II. II.
Package / Finish Specifications
III. III. III. III. III. Configurability
IV. IV. IV. IV. IV. Special Application
V. V. V. V. V. Valve Configuration
VI. VI. VI. VI. VI. Gas or SH MultiFlo Bin
VII. Fitting VII. VII.
VII. VII.
VIII. Downstream Condition VIII. VIII.
VIII. VIII.
IX. IX. IX. IX. Sensor
IX.
X. X. X. X. X. BX BX BX BX
Connector BX
EX EX EX EX EX
FX FX FX FX FX
G1 G1 G1 G1 G1
JX JX JX JX JX
KX KX KX KX KX
SX SX SX SX SX
UX UX UX UX UX
D0 D0
D0 D0 D0
D1 D1 D1 D1 D1
D2 D2
D2 D2 D2
D3 D3 D3 D3 D3
D4 D4 D4 D4 D4
D5 D5 D5 D5 D5
D6 D6 D6 D6 D6
D7 D7 D7
D7 D7
D8 D8 D8 D8 D8
D9 D9 D9
D9 D9
D D D D D A A A A A
DB DB
DB DB DB
DC DC DC DC DC
DD DD
DD DD DD
DE DE DE DE DE
D D D D D X X X X X
XI. XI. XI. XI. XI. Customer Special Request
XII. XII. XII. Auto Shut-Off
XII. XII.
XIII. Auto Zero XIII. XIII.
XIII. XIII.
XIV. XIV.
XIV. Reference Temperature XIV. XIV.
Sample Standard Model Code Sample Standard Model Code Sample Standard Model Code
Sample Standard Model Code Sample Standard Model Code
I I I I I II II II II II III III III III III
GF GF GF GF GF 101 101 101 101 101 C C C C C
Code Option Code Option Option Description Option Description
Code Option Code Option Code Option Option Description Option Description Option Description
GF GF GF GF GF High Purity/Ultra High Purity Digital Mass Flow Controllers
101 101
101 101 101 Flow range 55 - 300 slm N
121 121 121 121 121 Flow range 55 - 300 slm N
126 126
126 126 126 Flow range 55 - 300 slm N
C C C C C MultiFlo capable
X X X X X
Not configurable
XX XX XX XX XX Standard
C C C C C Normally Closed valve
M M M M M Meter (No Valve)
XXXX XXXX XXXX XXXX XXXX XXXX XXXX XXXX XXXX XXXX Specific Gas Code & Range, i.e. "0004" = Argon and "100L" = 100 slpm
SH51 055L SH51 055L SH51 055L SH51 055L SH51 055L Standard Configuration #51, 55,001 sccm N2 Equivalent (0°C Reference)
Special Bin for low density gases, e.g. 73,002-120,000 He, 100,002-170,000 H2
SH52 100L SH52 100L SH52 100L SH52 100L SH52 100L Standard Configuration #52, 55,002-100,000 sccm N2 Equivalent (0°C Reference)
SH53 200L SH53 200L SH53 200L Standard Configuration #53, 100,001-200,000 sccm N2 Equivalent (0°C Reference)
SH53 200L SH53 200L
SH54 300L SH54 300L SH54 300L SH54 300L SH54 300L Standard Configuration #54, 200,001-300,000 N2 Equivalent (0°C Reference)
V1 V1 V1 V1 1-1/2" body width, 134mm 1/2" VCR male (See Accessories on Page 3 for VCR lay length adapters)
V1
V2 V2 V2 V2 V2 1-1/2" body width, 150.4mm 1/2" VCR male
V3 V3 V3 V3 1-1/2" body width, 166mm 1/2" VCR male
V3
V4 V4 V4 V4 V4 1-1/2" body width, 168.6mm 1/2" VCR male
C1 C1 C1 C1 1-1/2" body width, 92mm 3/8" C Seal
C1
C2 C2 C2 C2 C2 1-1/2" body width, 114mm 3/8" C Seal
A A A A A Atmosphere
V V V V V Vacuum
O O O O O Default Sensor Orientation
Cable adapter to 15 pin D Brooks (Unit "B","N")
Cable adapter to card edge (w/out VTP), RS485 through RJ11 jacks (Unit"E"; IN "L", "R");
O orientation
display and overlay 180
Cable adapter with 9 pin STEC pin-out & jack screws (w/VTP) (Unit"F","O")
9-Pin D with RS485 (Unit"G")
Cable adapter with 9 pin STEC pin-out & jack screws (w/VTP) (Unit"J","W")
Cable adapter to MKS 15-Pin D (Unit "K")
9 pin D with STEC pin-out (w/VTP) (Unit"S","Q")
Cable adapter to 15 pin D (w/VTP) (Unit & TN "U")
Power On Full Scale Full Scale Full Scale Instance
I/O Connector
DeviceNet 5 Pin Micro
DeviceNet 5 Pin Micro
DeviceNet 5 Pin Micro
DeviceNet 5 Pin Micro
DeviceNet 5 Pin Micro Executing
DeviceNet 5 Pin Micro
DeviceNet 5 Pin Micro
DeviceNet 5 Pin Micro
DeviceNet 5 Pin Micro
DeviceNet 5 Pin Micro Executing
DeviceNet 5 Pin Micro
DeviceNet 5 Pin Micro
DeviceNet 5 Pin Micro
DeviceNet 5 Pin Micro Executing
DeviceNet 5 Pin Micro Executing
DeviceNet 5 Pin Micro To be defined by CSR
XXXX XXXX XXXX XXXX XXXX Customer Special Request Number
A A A A A Auto Shut-Off (Included)
X X X X X Auto Shut-Off (Not Included) (Must be selected for meter)
A A A A A Auto Zero (Included)
X X X X X Auto Zero (Not Included)
000 000 o o o o o
000 000 000 0 C Reference Calibration (Standard) - Default Setting
IV IV IV IV IV V V VI VI VII VII
V V V VI VI VI VII VII VII
XX XX XX XX XX C C C C C - SH52 100L - - - - - SH52 100L - V1 SH52 100L - SH52 100L - SH52 100L - V1 V1 V1 V1
Section 5 Product Description Code
Eq.; 10 Ra HP wetted flow path
2 2 2 2 2
Eq. 5 Ra UHP wetted flow path
2 2 2 2 2
Eq. 5 Ra UHP wetted flow path & integrated pressure measurement
2 2 2 2 2
DeviceNet Standard Configuration Parameters
State Setting Setting Setting
Idle Count Integer 6000h
Idle Count Integer 6000h
Idle SCCM Float 7FFFh
Idle Count Integer 6000h
Count Integer 6000h
Idle Count Integer 6000h
Idle Count Integer 7FFFh
Idle Count Integer 7FFFh
Idle Count Integer 6000h
Count Integer 6000h
Idle Count Integer 7FFFh
Idle Count Integer 6000h
Idle Count Integer 7FFFh
Count Integer 7FFFh
SCCM Float 6000h
VIII VIII IX IX IX IX IX X X X X X
VIII VIII VIII
A A A A A 0 0 0 0 0 G1 G1 G1 G1 G1 - - - - -
GF100 Series
Poll IO Poll IO Poll IO
Instance State
Producer Consumer Transition
2 7 Executing 500KB
21 7 Executing 500KB
13 19 Executing 500KB
22 7 Executing 500KB
22 8 Executing 500KB
6 8 Executing 500KB
3 7 Executing 500KB
6 8 Executing 500KB
3 7 Executing 500KB
2 7 Executing 500KB
22 7 Executing 500KB
22 8 Executing 500KB
3 7 Idle
22 8 Executing 500KB
15 19 Executing 500KB
XI XI XI XI XI XII XII XII XIII XIII XIV XIV
XII XII XIII XIII XIII XIV XIV XIV
XXXX XXXX XXXX XXXX XXXX A A A A A X X X X X - 000 - 000 - 000 - 000 - 000
External
Baud
Rate
500KB
5-5