Gf100 Series Troubleshooting Guide - Brooks Instrument GF100 Serie Manual De Instrucciones

Section 4 Maintenance & Troubleshooting
GF100 Series

4-5 GF100 Series Troubleshooting Guide

Table 4-2 GF100 Series Troubleshooting Guide
Symptoms & Possible Causes
1. No gas flow.
Is the gas supply turned on?
Is the regulator turned on at the
correct operating pressure?
Are any upstream or downstream
shut-off valves closed, either by
the system or because of failure?
Is the MOD LED light on the GF100 Series
lit solid green?
Is the commanded setpoint from
tool/system at 0.00 Vdc?
Has the been commanded
off by an active "valve
closed" input?
2. Flow out of range.
Is the gas inlet/outlet pressure differential
either too high or too low?
NOTE: If the differential pressure is too high,
voltage to the will be zero, which is
abnormally low for the setpoint. If the
differential is too low, voltage to will
be at its maximum value, which is abnormally
high for the set-point.
Is the MOD LED light on the GF100 Series
lit solid green?
Is the setpoint correct for the
required gas flow?
Is the calibrated for the
particular gas?
Is the zero correct?
3. No gas control; flow is at or
above maximum.
Is the gas pressure across the
too high?
Are system valves open, or is the
purge input activated?
Is the setpoint correct for the
required flow?
4-4
Corrective Action
Check shut-off valve and pressure readout. Open
the gas supply.
Turn off the regulator and reset it to the
recommended pressure as described in the
Data Sheet.
Verify that the valves are open and operating
properly.
Observe the LED display panel on top of to
verify. If the LED light is not lit, cycle power the
to reboot.
Use the tool software to verify.
Use the tool software to verify.
Verify that the pressure is correct for the gas
and range. If required, adjust inlet/outlet pressure
to achieve proper pressure reading.
Observe the LED display panel at top of .
If the LED light is not lit, cycle power the to
reboot.
Use the tool software to verify.
Check the side label. Run a
flow check to verify.
Zero the according to zeroing
procedure in Section 2-14. Verify leak check rates
are OK.
Verify that the pressure is correct for the gas and
range. If required, adjust inlet/outlet pressure to
achieve proper pressure reading.
Use tool software to verify.
Use tool software to verify.
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017