Brooks Instrument GF100 Serie Manual De Instrucciones página 55

Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
Table 4-2 GF100 Series Troubleshooting Guide (Continued)
Symptoms & Possible Causes
10. Calibration Drift.
Gas box temperature too high?
Is it linear offset?
11. GF100 Series indicates Overshoot.
12.OEM tool indicates the wrong full scale
value for GF100 Series.
13. GF100 Series dumps large volume of
gas into chamber when setpoint is
commanded from the tool.
14. Tool display output doesn't match
GF100 Series flow output.
Cable resistance causing offset in the tool's
display.
Section 4 Maintenance & Troubleshooting
Corrective Action
Zero is not correct.
If the tool is idle for an extended period of time,
high inlet pressure or contamination will cause
overshoot on first use.
Older version of Multiflo Configurator used
to program GF100 Series.
The tool is commanding a setpoint before the
pneumatic valves are opened.
GF100 Series and pneumatic timing may be offset.
GF100 Series overshoots.
Check GF100 Series zero.
GF100 Series
4-7