Brooks Instrument GF100 Serie Manual De Instrucciones página 59

Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
Table 5-2 GF100, GF120 & GF125 Series with EtherCAT Communications Product Description Code
Code Description Code Description
Code Description Code Description Code Description
I. I. I. I. I. Base Model Code
II. II. II. II. II.
Package / Finish Specifications
III. III. III. III. III. Configurability
IV. IV. IV. Special Application
IV. IV.
V. V. V. V. V.
Valve Configuration
VI. VI. VI. VI. VI. Gas or SH MultiFlo Bin
VII. Fitting VII. VII. VII. VII.
VIII. VIII. VIII. VIII. Downstream Condition VIII.
IX. IX. IX. IX. IX. Sensor
X. X. X. X. X. Connector
XI. XI. XI. XI. XI. Customer Special Request
XII. XII. XII. XII. Auto Shut-Off XII.
XIII. Auto Zero XIII. XIII. XIII. XIII.
XIV. Reference Temperature XIV. XIV. XIV. XIV.
Code Option Code Option Option Description Option Description
Code Option Code Option Code Option Option Description Option Description Option Description
GF GF GF GF GF High Purity/Ultra High Purity Digital Mass Flow Controllers
100 100
100 100 100 Flow range 3 sccm - 55 slpm N2 Equivalent.; 1 sec Response; 10 Ra
120 120 120 120 120 Flow range 3 sccm - 55 slpm N2 Equivalent.; 700 msec Response; 5 Ra
125 125 125 125 125 Pressure Transient Insensitive (PTI) Flow range 3 sccm -55 slpm N2 Equivalent;
300-700 msec Response; 5 Ra
C C C C C MultiFlo capable. Standard bins or specific gas/range may be selected.
X X X X X Not MultiFlo capable. Specific gas/range required. (must select w/ SD or SL special application)
XX XX XX XX Standard
XX
SL SL SL SL SL
Safe Delivery System (GF120 Only) Full scale flow range; 4 to 25 sccm, N2 Equivalent
SD SD SD SD SD Safe Delivery System (GF120 Only) Full scale flow range; 25 sccm to 1 slpm, N2 Equivalent
O O O O O
Normally Open valve (not available with SD, SL or VS options)
C C C C C Normally Closed valve
M M M M M Meter (No Valve)
XXXX XXXX XXXX XXXX XXXX XXXX XXXX XXXX XXXX XXXX Specific Gas Code & Range, i.e. "0004" = Argon and "010L" = 10 slpm
SH40 010C SH40 010C SH40 010C SH40 010C SH40 010C Standard Configuration #40, 3-10 sccm Nitrogen Equivalent
SH41 030C SH41 030C SH41 030C SH41 030C SH41 030C Standard Configuration #41, 11-30 sccm Nitrogen Equivalent
SH42 092C SH42 092C SH42 092C Standard Configuration #42, 31-92 sccm Nitrogen Equivalent
SH42 092C SH42 092C
SH43 280C SH43 280C SH43 280C Standard Configuration #43,93-280 sccm Nitrogen Equivalent
SH43 280C SH43 280C
SH44 860C SH44 860C
SH44 860C SH44 860C SH44 860C Standard Configuration #44, 281-860 sccm Nitrogen Equivalent
SH45 2.6L SH45 2.6L SH45 2.6L SH45 2.6L SH45 2.6L Standard Configuration #45, 861-2600 sccm Nitrogen Equivalent
SH46 7.2L SH46 7.2L SH46 7.2L SH46 7.2L SH46 7.2L Standard Configuration #46, 2601-7200 sccm Nitrogen Equivalent
SH47 015L SH47 015L SH47 015L SH47 015L SH47 015L Standard Configuration #47, 7201-15000 sccm Nitrogen Equivalent
SH48 030L SH48 030L SH48 030L Standard Configuration #48, 15001-30000 sccm Nitrogen Equivalent
SH48 030L SH48 030L
SH49 040L SH49 040L
SH49 040L SH49 040L SH49 040L Standard Configuration #49, 30001-40000 sccm Nitrogen Equivalent
SH50 055L SH50 055L SH50 055L SH50 055L SH50 055L Standard Configuration #50, 40001-55000 sccm Nitrogen Equivalent
VS VS VS VS VS 1-1/8" body width, 1/4" VCR male
VX VX VX VX VX 1-1/2" body width, 1/4" VCR male
CX CX CX CX CX 1-1/8" body width, C Seal 92mm
WX WX WX 1-1/8" body width, W Seal 92mm
WX WX
A A A A A Atmosphere
V V V V V Vacuum
O O O O O Default Sensor Orientation
E0 E0 E0 E0 E0 EtherCAT Communication
XXXX XXXX XXXX XXXX XXXX Customer Special Request Number
A A A A A Auto Shut-Off (Included)
X X X X X Auto Shut-Off (Not Included)
X X X X X Auto Zero (Not Included)
000 000 000 000 000 0 deg C Reference Calibration (Standard) - Default Setting
Section 5 Product Description Code
GF100 Series
5-3