Troubleshooting; Troubleshooting Checklist - Brooks Instrument GF100 Serie Manual De Instrucciones

Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017

4-3 Troubleshooting

4-4 Troubleshooting Checklist

Section 4 Maintenance & Troubleshooting
This section includes a Troubleshooting Checklist and a GF100 Series
Troubleshooting Guide that identifies symptoms, possible causes, and
corrective actions.
1. Check environmental factors that could affect changes to GF100 Series
performance. The most common environmental factors are listed in
Table 4-1.
Table 4-1 Environmental Factors
GF100 Series Performance
Inaccurate flow.
Control problems. Can
not reach setpoint.
Oscillation.
Zeroing problems, Indicated
zero is not stable.
2. Check supply voltage and check for a consistent ground.
3. Insure OEM tool setpoint matches the setpoint at the GF100 Series.
Observe for consistency.
4. Verify isolations valves are open and the gas supply is turned on. Then
verify operating pressures are within operating ranges.
5. Check GF100 Series voltage response by moving the setpoint back
and forth.
Observe for voltage changes.
Possible Causes
Temperature shift (steady state or transient).
Inlet pressure shift (steady state or transient).
Power supply problem.
Electrical interference
Dirty gas chamber
Changes in gas.
Differential pressure not within operating range
Inlet pressure not stable
Temperature shift (steady state or transient).
Inlet pressure shift (steady state or transient).
Power supply problem.
Electrical interference
GF100 Series
4-3