Perform A Leak Test; Zeroing Setup Process; Zeroing The Gf100 Series - Brooks Instrument GF100 Serie Manual De Instrucciones

Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017

2-13 Perform a Leak Test

2-14 Zeroing Setup Process

2-15 Zeroing the GF100 Series

It is critical to leak test the gas supply lines and GF100 Series connections
before turning on the process gas supply after any new installation. Check
for leaks using a helium leak detector or any other appropriate leak test
method. Follow leak test specifications as defined by integrator.
The following steps are required before the GF100 Series is zeroed.
1. Make sure that the GF100 Series has been installed inside the
equipment (panel) for at least four hours and powered up at least one
hour prior to zeroing. This insures that the GF100 Series is in its "use
attitude" and is operating at normal temperature. If the GF100 Series is
subjected to a vacuum purge for more than one minute, turn off the
GF100 Series (ie., provide a zero setpoint) for a time period of twice the
vacuum purge time.
2. Refer to Figure 2-1. Open the upstream shut-off valve (5) and close the
downstream shut-off valve (7). This eliminates a pressure drop across
the GF100 Series and subsequent leakage from the PID control valve
inside the GF100 Series.
3. Provide a 100% setpoint to the GF100 Series for no longer than 60
seconds. This equalizes the pressure across the PID control valve.
4. Refer to Figure 2-1. Close the upstream shut-off valve (5) to prevent any
pressure effects from the regulator (3).
5. Close the GF100 Series and wait two minutes.
6. Read the output signal of the GF100 Series. This output signal is the
initial flow in percent of full scale. The output signal should be 0.0 (±
0.1%). If the output signal is too high, re-zero the GF100 Series as
described in Section 2-15.
Many high density gases exhibit slight changes in zero output as a function of
inlet pressure. Gases such as tungsten hexafluoride and many fluorocarbons
are especially sensitive to this problem. Since inlet pressure is a potential
source for zero errors, the pressure transducer on each GF100 Series should
be correctly set to zero after installation. The zeroing process is performed
from the backlight LCD display on top of the GF100 Series.
OEM tools using a microprocessor or computer for operating the GF100
Series should sequence the GF100 Series off between processes. To
accomplish this, simply provide a zero set point. The GF100 Series will
shut off automatically.
Section 2 Installation
WARNING
!
GF100 Series
2-7