Operating Conditions - Brooks Instrument GF100 Serie Manual De Instrucciones

Section 1 Introduction
GF100 Series
Table 1-4 Specifications for Safe Delivery System (SDS) GF120 Series
Performance Performance Performance Performance Performance
Full Scale Flow Range (N Full Scale Flow Range (N Full Scale Flow Range (N
Full Scale Flow Range (N Full Scale Flow Range (N
Gases Supported Gases Supported Gases Supported Gases Supported Gases Supported
MultiFlo Programmable MultiFlo Programmable MultiFlo Programmable MultiFlo Programmable MultiFlo Programmable
Flow Accuracy Flow Accuracy Flow Accuracy Flow Accuracy Flow Accuracy
Repeatability & Reproducibility Repeatability & Reproducibility Repeatability & Reproducibility Repeatability & Reproducibility Repeatability & Reproducibility
Zero Stability Zero Stability
Zero Stability Zero Stability Zero Stability
Settling Time (to within + + + + + 2% F.S.) Settling Time (to within Settling Time (to within Settling Time (to within Settling Time (to within
Warm Up Time Warm Up Time
Warm Up Time Warm Up Time Warm Up Time
Leak Integrity Leak Integrity Leak Integrity
Leak Integrity Leak Integrity
Valve Shut Down (Leaky by) Valve Shut Down (Leaky by)
Valve Shut Down (Leaky by) Valve Shut Down (Leaky by) Valve Shut Down (Leaky by)

Operating Conditions

Operating Conditions Operating Conditions Operating Conditions Operating Conditions
Minimum Operating Inlet Pressure* Minimum Operating Inlet Pressure*
Minimum Operating Inlet Pressure* Minimum Operating Inlet Pressure* Minimum Operating Inlet Pressure*
Maximum Pressure Maximum Pressure Maximum Pressure Maximum Pressure Maximum Pressure
Pressure Insensitivity Pressure Insensitivity Pressure Insensitivity Pressure Insensitivity Pressure Insensitivity
DifferentialPressure** DifferentialPressure** DifferentialPressure** DifferentialPressure** DifferentialPressure**
Valve Configuration Valve Configuration Valve Configuration Valve Configuration Valve Configuration
Ambient Temperature Range Ambient Temperature Range Ambient Temperature Range Ambient Temperature Range Ambient Temperature Range
Zero Temperature Coefficient Zero Temperature Coefficient Zero Temperature Coefficient
Zero Temperature Coefficient Zero Temperature Coefficient
*Performance at minimum inlet pressure will be gas and flow range dependent. Consult Technical Support for details.
**Typical pressure drop. Actual pressure drop will be gas and flow dependent. Consult Technical Support for details.
***Consult factory for other gases.
1-10
GF120XSL GF120XSL
GF120XSL GF120XSL GF120XSL
Eq.) Eq.) Eq.) 4 - 25 sccm
Eq.) Eq.)
2 2 2 2 2
AsH
3
+/-1% S.P. >35% F.S. +/-0.35% F.S. <35% F.S.
2% F.S.) 2% F.S.) 2% F.S.) 2% F.S.)
GF120XSD GF120XSD GF120XSD GF120XSD GF120XSD
10 Torr-30 psid typical (1.33-207 kPa typical)
Span: 0.05% SP per
GF120XSD GF120XSD
GF120XSD GF120XSD GF120XSD
>25 to 1 slpm
, PH , BF , SiF , Ar, Xe, N O, N , GeF4, AsF5, PF3,
3 3 4 2 2
H2Se, HMDSO, HMDSN, H2O***
Not Configurable
<+/- 0.15% S.P.
<=0.6% F.S. per year
< 3 sec
minimum of 30 minutes
1X10 -11 atm. cc/sec He
<1% F.S.
GF120XSL GF120XSL GF120XSL GF120XSL GF120XSL
4 to 20 sccm < 10 Torr
>20 to 50 sccm < 20 Torr
>50 sccm to 1 slpm < 50 Torr
500 psia max
Not Available
Normally Closed
10 O C-50 O C
O C, Zero: 0.005% F.S. per O C
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017