Brooks Instrument GF100 Serie Manual De Instrucciones página 13

Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
High Purity Flow Path
The Brooks GF Series has an all metal, corrosion resistant Semi F20
compliant wetted flow path with highly corrosion resistant Hastelloy C-22
valve seat and jet orifice. The GF120, GF125 & GF135 devices are
constructed with a 4μ inch Ra max surface finish while the GF100 is
constructed with a 10μ inch Ra.
• Overall reduced surface area and un-swept volumes for faster dry-down
during purge steps
• Long-term sensor and device stability for maximum yield and throughput
Extensive Mechanical Configurations
GF Series supports all metal seal/UHP industry gas connection interface
standards for full OEM and process coverage.
• Downport 79.8mm and 92mm C-seal and W-seal on 1-1/8" and 1-1/2"
bodies
• 124mm 4 VCR on 1-1/2" body
Figure 1-2 LCD Display
Enhanced Diagnostics and User Interface
The mass flow controller is one of the most complex and critical
components in gas delivery systems. When dealing with ultra-high-purity
gas distribution or highly toxic or corrosive gases, removing the mass flow
controller to assess functionality should be the last resort. Brooks GF
Series devices provide for in-line device evaluation and instantaneous
troubleshooting through:
• Embedded self test routines and independent diagnostic/service port
• High visibility LCD display with easy accessible push button for local
indication of Flow (%), Temperature (
Network Address
• Zero button to easily re-zero the device during scheduled maintenance
• Rotatable display with a push button to enable improved readability based
on how the MFC is mounted. Simply hold button down for at least 3
seconds to rotate display. This featue is standard for GF135 and GF101/
GF121/GF126 and available for GF100/GF120/GF125.
This combination of features results in limiting service interruption and
reduced downtime.
Section 1 Introduction
GF100 Series
C), Pressure (PSIA/kPa) and
o
1-7