Brooks Instrument GF100 Serie Manual De Instrucciones página 15

Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
Table 1-3 Specifications for Standard GF100/GF120/GF125 Series
Performance Performance
Performance Performance Performance
Full Scale Flow Range (N Full Scale Flow Range (N Eq.) Eq.)
Full Scale Flow Range (N Full Scale Flow Range (N Full Scale Flow Range (N Eq.) Eq.) Eq.)
2 2 2 2 2
Flow Accuracy Flow Accuracy Flow Accuracy Flow Accuracy Flow Accuracy
Repeatability & Reproducibility Repeatability & Reproducibility Repeatability & Reproducibility Repeatability & Reproducibility Repeatability & Reproducibility
Linearity Linearity
Linearity Linearity Linearity
Response Time (Settling Time) Response Time (Settling Time) Response Time (Settling Time) Response Time (Settling Time) Response Time (Settling Time)
Normally Closed Valve Normally Closed Valve
Normally Closed Valve Normally Closed Valve Normally Closed Valve
Normally Open Valve Normally Open Valve Normally Open Valve Normally Open Valve Normally Open Valve
Pressure Insensitivity Pressure Insensitivity Pressure Insensitivity
Pressure Insensitivity Pressure Insensitivity
Control Range Control Range Control Range Control Range Control Range
MultiFlo MultiFlo MultiFlo MultiFlo MultiFlo
#of Bins #of Bins #of Bins
#of Bins #of Bins
Valve Shut Down (N.C. Valve) Valve Shut Down (N.C. Valve)
Valve Shut Down (N.C. Valve) Valve Shut Down (N.C. Valve) Valve Shut Down (N.C. Valve)
Valve Shut Down (N.O. Valve) Valve Shut Down (N.O. Valve) Valve Shut Down (N.O. Valve)
Valve Shut Down (N.O. Valve) Valve Shut Down (N.O. Valve)
Zero Stability Zero Stability Zero Stability Zero Stability Zero Stability
Temperature Coefficient Temperature Coefficient Temperature Coefficient Temperature Coefficient Temperature Coefficient
Ratings Ratings Ratings Ratings Ratings
Operating Temperature Range Operating Temperature Range Operating Temperature Range Operating Temperature Range Operating Temperature Range
Differential Pressure Range* Differential Pressure Range* Differential Pressure Range* Differential Pressure Range* Differential Pressure Range*
Maximum Operating Pressure Maximum Operating Pressure Maximum Operating Pressure Maximum Operating Pressure Maximum Operating Pressure
Leak Integrity (external) Leak Integrity (external) Leak Integrity (external) Leak Integrity (external) Leak Integrity (external)
Mechanical Mechanical Mechanical
Mechanical Mechanical
Valve Type Valve Type Valve Type Valve Type Valve Type
Wetted Materials Wetted Materials
Wetted Materials Wetted Materials Wetted Materials
Surface Finish Surface Finish Surface Finish Surface Finish Surface Finish
Diagnostics & Display Diagnostics & Display Diagnostics & Display Diagnostics & Display Diagnostics & Display
Status Lights Status Lights Status Lights Status Lights Status Lights
Alarms Alarms
Alarms Alarms Alarms
Display Type Display Type Display Type Display Type Display Type
Viewing Angle / Viewing Distance Viewing Angle / Viewing Distance
Viewing Angle / Viewing Distance Viewing Angle / Viewing Distance Viewing Angle / Viewing Distance
Units Displayed / Resolution Units Displayed / Resolution Units Displayed / Resolution
Units Displayed / Resolution Units Displayed / Resolution
Electrical Electrical Electrical
Electrical Electrical
Electrical Connection Electrical Connection Electrical Connection Electrical Connection Electrical Connection
Digital Communication Digital Communication Digital Communication Digital Communication Digital Communication
Diagnostic /Service Port Diagnostic /Service Port Diagnostic /Service Port
Diagnostic /Service Port Diagnostic /Service Port
Power Supply/Consumption Power Supply/Consumption
Power Supply/Consumption Power Supply/Consumption Power Supply/Consumption
Compliance Compliance Compliance Compliance Compliance
EMC EMC
EMC EMC EMC
Environmental Compliance Environmental Compliance Environmental Compliance
Environmental Compliance Environmental Compliance
NOTE: See the following Safe Delivery System (SDS) section for optional detailed specifications
GF100 GF100
GF100 GF100 GF100
+1% S.P. > 35-100%,
+ 0.5% F.S. (included in accuracy)
< 1 sec
Not Applicable
2-100% (Normally Closed Valve)
Span: 0.05% S.P. per
3-860 sccm = 7-45 psid, 861- 7200 sccm = 10-45 psid, 7201-55000 sccm = 15-45 psid
*Argon gas applications require an additional 10 psid differential pressure.
Low vapor pressure gases require an inlet pressure of > 100 Torr, with vacuum on outlet
(example SiCl4). Contact Brooks Technical Support for more information.
500 psia max
GF100: SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45
GF120/GF125: SEMI F20 UHP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45
10μ inch Ra
Control Valve Output, Network Interruption
Top Mount Integrated LCD
Fixed / 10 feet
Flow (%), Temp. ( o C), Pressure (psia, kPa) / 0.1 (unit)
RS485/Analog via 9-Pin "D" connector, DeviceNet
RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models)
RS485 via 2.5mm jack
DeviceNet: 545mA max. @ +11-25 Vdc., 250mA max. @ 24Vdc
RS485/Analog: 6 Watts max @ +15Vdc. (+10%) or +24 Vdc (±10%)
EC Directive 2004/108/EC CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006
GF120 GF120
GF120 GF120 GF120
3 sccm to 55 slm
+0.35% F.S. 2-35%
< + 0.15% S.P.
300ms (3-860 sccm N2 Eq.)
700ms 400ms (861-7200 sccm N2 Eq.)
500ms (7201-30000 sccm N2 Eq.)
<700ms (30001-55000 sccm N2 Eq.)
<1.5 sec
< 5% SP up to 5 psi/sec upstream press. spike
3-100% (Normally Open Valve)
standard
11 bins
< 1% of F.S.
2% of F.S.
< + 0.5% F.S. per year
o C, Zero: 0.005% F.S. per
o
10-50 C
-10
1x10 atm. cc/sec He
Normally Closed
Normally Open
Meter (no valve)
4μ inch Ra (0.1 μm Ra)
MFC Health, Network Status
TM
via 5-Pin "M12" connector
Section 1 Introduction
GF100 Series
GF125 GF125
GF125 GF125 GF125
o C
100 psia max
1-9