Brooks Instrument GF100 Serie Manual De Instrucciones página 20

Section 1 Introduction
GF100 Series
Table 1-8 Specifications for GF101/GF121/GF126 Series with EtherCAT Communications
Performance Performance
Performance Performance Performance
Full Scale Flow Range Full Scale Flow Range Full Scale Flow Range Full Scale Flow Range Full Scale Flow Range
Flow Accuracy Flow Accuracy
Flow Accuracy Flow Accuracy Flow Accuracy
Repeatability & Reproducibility Repeatability & Reproducibility Repeatability & Reproducibility Repeatability & Reproducibility Repeatability & Reproducibility
Response Time/Settling Time Response Time/Settling Time Response Time/Settling Time Response Time/Settling Time Response Time/Settling Time
(NC Valve) (NC Valve) (NC Valve) (NC Valve) (NC Valve)
Pressure Insensitivity Pressure Insensitivity Pressure Insensitivity
Pressure Insensitivity Pressure Insensitivity
Control Range Control Range Control Range Control Range Control Range
MultiFlo MultiFlo
MultiFlo MultiFlo MultiFlo
#of Bins #of Bins #of Bins #of Bins #of Bins
Valve Shut Down (N.C. Valve) Valve Shut Down (N.C. Valve) Valve Shut Down (N.C. Valve) Valve Shut Down (N.C. Valve) Valve Shut Down (N.C. Valve)
Zero Stability Zero Stability Zero Stability
Zero Stability Zero Stability
Temperature Coefficient Temperature Coefficient Temperature Coefficient Temperature Coefficient Temperature Coefficient
Ratings Ratings Ratings Ratings Ratings
Operating Temperature Range Operating Temperature Range
Operating Temperature Range Operating Temperature Range Operating Temperature Range
Differential Pressure Range Differential Pressure Range Differential Pressure Range Differential Pressure Range Differential Pressure Range
Maximum Operating Pressure Maximum Operating Pressure Maximum Operating Pressure Maximum Operating Pressure Maximum Operating Pressure
Leak Integrity (external) Leak Integrity (external) Leak Integrity (external)
Leak Integrity (external) Leak Integrity (external)
Mechanical Mechanical Mechanical Mechanical Mechanical
Valve Type Valve Type Valve Type Valve Type Valve Type
Wetted Materials Wetted Materials Wetted Materials
Wetted Materials Wetted Materials
Surface Finish Surface Finish Surface Finish Surface Finish Surface Finish
Diagnostics & Display Diagnostics & Display
Diagnostics & Display Diagnostics & Display Diagnostics & Display
Status Lights Status Lights
Status Lights Status Lights Status Lights
Alarms Alarms Alarms Alarms Alarms
Display Type Display Type Display Type Display Type Display Type
V V V V V iewing Angle / Viewing Distance iewing Angle / Viewing Distance iewing Angle / Viewing Distance iewing Angle / Viewing Distance
iewing Angle / Viewing Distance
U U U U U nits Displayed / Resolution nits Displayed / Resolution nits Displayed / Resolution nits Displayed / Resolution nits Displayed / Resolution
Electrical Electrical Electrical
Electrical Electrical
Electrical Connection Electrical Connection Electrical Connection
Electrical Connection Electrical Connection
Digital Communication Digital Communication Digital Communication Digital Communication Digital Communication
Diagnostic /Service Port Diagnostic /Service Port
Diagnostic /Service Port Diagnostic /Service Port Diagnostic /Service Port
Power Supply/Consumption Power Supply/Consumption Power Supply/Consumption Power Supply/Consumption Power Supply/Consumption
Compliance Compliance
Compliance Compliance Compliance
EMC EMC
EMC EMC EMC
Environmental Compliance Environmental Compliance
Environmental Compliance Environmental Compliance Environmental Compliance
1-14
GF101 GF101 GF101 GF101 GF101
Not Applicable
SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45
10μ inch Ra
Control Valve Output, Network Interruption, Temperature High/Low, Pressure High/Low, Power Surge/Sag
320 mA max. @ 18-30 Vdc, 230 mA max. @ 24 Vdc (under typical operating conditions)
EMC Directive 2014/30/EU Evaluation Standard EN61326-1:2013
RoHS Directive (2011/65/EU)
REACH Directive EC (1907/2006)
GF121 GF121 GF121 GF121 GF121
55 slm to 300 slm
+1% S.P. > 35-100%; +0.35% F.S. 2-35%
< + 0.15% S.P.
< 1 sec
5-100% (Normally Closed Valve)
Standard
4 bins
<2% of F.S. @30 N2 psig/atm out
< + 0.15% F.S. per year
Zero: 0.005% F.S. per o C
o
10-50 C
30-90 psid
Controller: 75 psig
Meter: 150 psig
1x10^ -10 atm. cc/sec He
Normally Closed
Meter (no valve)
Run, Error, Power, Network Status
Top Mount Integrated LCD
Rotatable / 10 feet
o
Flow (%), Temp. ( C), Pressure (psia, kPa) / 0.1 (unit)
Power via 5-pin M8 Connector, EtherCAT via RJ45 jacks
EtherCAT
Micro-USB
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
GF126 GF126 GF126 GF126 GF126
Ability to measure inlet presssure
5μ inch Ra
April, 2017