Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
August, 2012
2-1 General
2-2 Receipt of Equipment
Americas:
Brooks Instrument
407 W. Vine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel (215) 362 3700
Fax (215) 362 3745
E-mail: BrooksAm@BrooksInstrument.com
www.BrooksInstrument.com
Europe, Middle East, Africa:
Brooks Instrument B.V.
Neonstraat 3, P.O. Box 428
6710 BX Ede
Netherlands
Tel +31 (0) 318 549292 or
+31 (0) 318 549291
E-mail: service.coordinator@Brooks Instrument.com
Brooks Instrument GmbH
Zur Wetterwarte 50 Haus 377/B,
01109 Dresden
Germany
Tel +49 (0) 351 215 20 442
E-mail: service.coordinatorDD@Brooks Instrument.com
This section provides installation instructions for the Brooks GF40/GF80
Series Thermal Mass Flow Devices. The installation process consists of
purging the gas supply line prior to installation, unpacking and inspecting
the device, connecting the device to the gas supply line and testing for
leaks.
When the instrument is received, the outside packing case should be checked
for damage incurred during shipment. If the packing case is damaged, the local
carrier should be notified at once regarding their liability. A report should be
submitted to your nearest Product Service Department.
In case you need technical assistance:
USA
888 275 8946
Netherlands
+31 (0) 318 549290
Germany
+49 351 215 2040
Japan
+81 3 5633 7100
Section 2 Installation
®
Brooks
GF40/GF80 Series
Asia, Japan:
Brooks Instrument
1-4-4 Kitsuna, Koto-ku
Tokyo 136-0073
Japan
Tel 81 (3) 5633-7104
Brooks Instrument Korea, Ltd.
D-406 Bundang Techno Park 151
Sungnam, Kyungki-do, 463-070
Korea
Tel +82 31 708 2522
Brooks Instrument (Shanghai) Co. LTD
RM 203, Bldg 6
NO 1888 Xin Jin Qiao Rd
Jinqiao E.P.Z. Pudong
Shanghai 201206
China
Tel 86-21-3895-4788
Korea
Taiwan
China
Singapore
+82 31 708 2521
+886 3 5590 988
+86 21 5079 8828
+6297 9741
2-1