Brooks Instrument GF40 Serie Manual De Instalación Y Funcionamiento página 43

Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
August, 2012
Table 4-2 GF40/GF80 Series Troubleshooting Guide (Continued)
Symptoms & Possible Causes
7. OEM tool does not read correct
Series zero reading.
Is the differential pressure across the
GF40/GF80 Series really zero?
Is the supply voltage within specified range?
Is the GF40/GF80 Series mounted in the proper
attitude? Is the flow output signal of the
GF40/GF80 Series really zero?
8. Zero Drift.
Improper zero of the GF40/GF80
Excessive Valve leakage?
9. Calibration Drift.
Gas box temperature too high?
Is it linear offset?
10. GF40/GF80 Series indicates Overshoot.
If the tool is idle for an extended period of time,
high inlet pressure or contamination will cause
overshoot on first use.
11.OEM tool indicates the wrong full scale
value for GF40/GF80
Older version of Multiflo Configurator used
to program GF40/GF80
12. GF40/GF80 Series dumps large volume
of gas into chamber when setpoint is
commanded from the tool.
The tool is commanding a setpoint before the
pneumatic valves are opened.
GF40/GF80 Series and pneumatic timing may be
offset. GF40/GF80 Series overshoots.
13. Tool display output doesn't match
GF40/GF80 Series flow output.
Cable resistance or read-out impedance causing
offset in the tool's display.
GF40/GF80
Series?
Series.
Series.
Section 4 Maintenance & Troubleshooting
Brooks
Corrective Action
GF40/GF80 Series valve leakage.
Incorrect MFC zero.
GF40/GF80 Series aging or sensor stabilization.
Zero is not correct.
Zero is not correct.
Purge the line before operating.
Update Multiflo Configurator.
Change the tool sequence.
Check cables and read out. Eliminate any ground loops.
®
GF40/GF80 Series
Refer to Section 2-17.
4-7