Tabla De Contenido - Brooks Instrument GF40 Serie Manual De Instalación Y Funcionamiento

Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
August, 2012
Paragraph
Number
Section 1 General Information
1-1 Introduction .................................................................................................................................... 1-1
1-2 How to Use This Manual ................................................................................................................ 1-1
1-3 Product Support References .......................................................................................................... 1-2
1-4 Notice and Caution Statements ..................................................................................................... 1-2
1-5 Product Warranty .......................................................................................................................... 1-2
1-6 How to Order a GF40/GF80 Series Device ..................................................................................... 1-2
1-7 Industry Standard References ....................................................................................................... 1-2
1-8 GF40/GF80 Series Gas Table ........................................................................................................ 1-3
1-9 Glossary of Terms and Acornyms .................................................................................................. 1-3
1-10 Description .................................................................................................................................... 1-5
1-11 Specifications for GF40/GF80 Series Devices .............................................................................. 1-7
Section 2 Installation
2-1 General .......................................................................................................................................... 2-1
2-2 Receipt of Equipment ..................................................................................................................... 2-1
2-3 Recommended Storage Practice ................................................................................................... 2-2
2-4 Return Shipment ............................................................................................................................ 2-2
2-5 Transit Precautions ........................................................................................................................ 2-2
2-6 Removal from Storage .................................................................................................................... 2-2
2-7 Gas Connections ........................................................................................................................... 2-3
2-8 In-Line Filter ................................................................................................................................... 2-3
2-9 Mechanical Installation .................................................................................................................. 2-3
2-10 Flow Controller Installation Arrangement ........................................................................................ 2-4
2-11 Purge the Gas Supply Line Before GF40/GF80 Series Installation ................................................ 2-5
2-12 Position and Mount the GF40/GF80 Series ................................................................................... 2-6
2-13 Perform a Leak Test ....................................................................................................................... 2-8
2-14 Performance Checks ..................................................................................................................... 2-8
2-15 Zeroing Setup Process .................................................................................................................. 2-8
2-16 Zeroing the GF40/GF80 Series ...................................................................................................... 2-9
2-17 Using the MultiFlo
2-19 Electrical Connections .................................................................................................................. 2-12
2-19-1 DeviceNet Connections ................................................................................................................. 2-12
2-19-2 Analog/RS485 Connector .............................................................................................................. 2-13
2-19-3 Profibus Connections ................................................................................................................... 2-14
2-19-4 EtherCAT Connections ................................................................................................................. 2-14
Section 3 Operation
3-1 General .......................................................................................................................................... 3-1
3-2 Theory of Operation for Flow Measurement .................................................................................... 3-1
Section 4 Maintenance & Troubleshooting
4-1 Overview ......................................................................................................................................... 4-1
4-2 Maintenance .................................................................................................................................. 4-1
4-3 Troubleshooting ............................................................................................................................. 4-2
4-4 Troubleshooting Checklist .............................................................................................................. 4-3
4-5 GF40/GF80 Series Troubleshooting Guide ..................................................................................... 4-4
Section 5 Product Description Code ...................................................................................................... 5-1
TM Configurator .................................................................................................. 2-10
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Brooks GF40/GF80 Series
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