Brooks Instrument GF40 Serie Manual De Instalación Y Funcionamiento página 7

Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
August, 2012
Table
Number
1-1 Industry Standard References ....................................................................................................... 1-3
1-2 Terms and Acronyms ..................................................................................................................... 1-4
1-3 Specifications for Standard GF40/GF80 Series ............................................................................. 1-8
1-4 Specifications for High Accuracy (HA) GF40/GF80 Series .......................................................... 1-10
1-5 Specifications for Safe Delivery System (SDS) GF40/GF80 Series ............................................. 1-10
2-1 K1 Substrate Torque Data .............................................................................................................. 2-7
2-2 Gas and Flow Ranges - MultiFlo Configurable - N2 Equivalent ..................................................... 2-10
4-1 Environmental Factors ................................................................................................................... 4-3
4-2 GF40/GF80 Series Troubleshooting Guide .................................................................................... 4-4
5-1 GF40/GF80 Series Product Description Code Table ..................................................................... 5-1
A-1 GF40/GF80 Series Gas Table - Codes 1-99, Bins SA40 to SA43 .................................................. A-1
A-2 GF40/GF80 Series Gas Table - Codes 108-5022, Bins SA40 to SA43 .......................................... A-2
A-3 GF40/GF80 Series Gas Table - Codes 1-99, Bins SA44 to SA50 .................................................. A-3
A-4 GF40/GF80 Series Gas Table - Codes 108-5022, Bins SA44 to SA50 .......................................... A-4
B-1 GF40/GF80 Series Patents ............................................................................................................ B-1
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Brooks GF40/GF80 Series
Contents
Table
Number
iii