Brooks Instrument GF40 Serie Manual De Instalación Y Funcionamiento página 50

Appendix A: GF40/GF80 Series Gas Table
Brooks ® GF40/GF80 Series
Table A-4 GF40/GF80 Series Gas Table - Codes 108-5022, Bins SA44 to SA50
Gas
Gas Symbol Code
SiCl4 108
C3H9N 109
SF6 110
C2F6 118
WF6 121
C3F8 128
C4F8 129
C3F6 138
C2HF5 155
CH2F2 160
CH6Si 185
(CH3)3SiH 190
C5F8 266
C4F6 270
C4F6-q) 297
C5F8O 354
Si3H9N 368
10%GeH4/H2 509
10%PH3/H2 516
4.5%PH3/N2 528
20%O2/He 536
5%H2/N2 542
1%B2H6/H2 557
1%PH3/H2 563
3%B2H6/N2 595
3%H2/N2 597
30%He/O2 603
30%O2/He 604
4%H2/He 606
4%H2/N2 607
5%B2H6/Ar 615
50%PH3/SiH4 632
10%O2/He 649
2%SiH4/N2 653
5%B2H6/N2 654
.8%B2H6/N2 662
10%PH3/He 674
2%B2H6/N2 695
10%GeH4/Ar 698
5%H2/He 762
5%B2H6/He 766
15%B2H6/H2 820
3%C2H4/He 878
10%B2H6/Ar 881
2.7%C2H4/He 897
1%GeH4/H2 898
.5%GeH4/H2 910
2%PH3/H2 916
3.9%H2/N2 930
10%B2H6/He 939
30%C2H4/He 946
10%H2/He 950
15%H2/B2H6 953
17%CH4/CO2 958
20%CH6Si/H2 962
50%CH3SiHCl2/H2 965
20%GeH4/H2 978
0.5%B2H6/He 979
COS-Special 5022
For reference only, consult factory on the latest tables.
For gases not specified for SA50, contact Brooks Product Marketing.
A-4
Gas Name Elastomer seal GF040
Silicon Tetrachloride Kalrez
Trimethylamine Kalrez
Sulfur Hexafluoride Viton,EPDM
Hexafluoroethane (Freon-116) Viton,Buna
Tungsten Hexafluoride -
Perfluoropropane Viton
Octafluorocyclobutane Viton
Hexafluoropropylene Viton,Buna
PENTAFLUOROETHANE (FREON-125) Viton
Difluoromethane Viton
Methylsilane (MONO) -
Trimethylsilane (TMSi) -
Octafluorocyclopentene -
Hexafluoro-2-butyne -
Hexafluoro Butadiene-1-3 -
Epoxyperfluorocyclopentene -
Trisilylamine (TSA) -
10%Germane/Hydrogen MIX-Check components
10%Phosphine/Hydrogen MIX-Check components
4.5%Phosphine/Nitrogen MIX-Check components
20%Oxygen/Helium MIX-Check components
5%Hydrogen/Nitrogen MIX-Check components
1%Diborane Hydrogen MIX-Check components
1%Phosphine/Hydrogen MIX-Check components
3%Diborane/Nitrogen MIX-Check components
3%Hydrogen/Nitrogen MIX-Check components
30%Helium/Oxygen MIX-Check components
30%Oxygen/Helium MIX-Check components
4%Hydrogen/Helium MIX-Check components
4%Hydrogen/Nitrogen MIX-Check components
5%Diborane/Argon MIX-Check components
50%Phosphine/Silane MIX-Check components
10%Oxygen/Helium MIX-Check components
2%SILANE/NITROGEN MIX-Check components
5%Diborane/Nitrogen MIX-Check components
.8%Diborane/Nitrogen MIX-Check components
10%Phosphine/Helium MIX-Check components
2%Diborane/Nitrogen MIX-Check components
10%Germane/Argon MIX-Check components
5%Hydrogen/Helium MIX-Check components
5%Diborane/Helium MIX-Check components
15%Diborane/Hydrogen MIX-Check components
3%Ethylene/Helium MIX-Check components
5%Diborane/Argon MIX-Check components
2.7%Ethylene/Helium MIX-Check components
1%Germane/Hydrogen MIX-Check components
0.5%Germane/Hydrogen MIX-Check components
2%Phosphine/Hydrogen MIX-Check components
3.9%Hydrogen/Nitrogen MIX-Check components
10%Diborane/Helium MIX-Check components
30%Ethylene/Helium MIX-Check components
10%Hydrogen/Helium MIX-Check components
15%Hydrogen/Diborane MIX-Check components
17%Methane/Carbon Dioxide MIX-Check components
20%Methylsilane (MONO)/Hydrogen MIX-Check components
50%Dichloromethylsilane/Hydrogen MIX-Check components
20%Germane/Hydrogen MIX-Check components
0.5%Diborane/Helium MIX-Check components
Carbonyl Sulfide (Special) -
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
SA44 SA45 SA46
Low High Low High Low High
57 172 173 520 521 1320
79 240 241 720 721 1910
78 237 238 715 716 1900
72 218 219 658 659 1750
51 150 151 460 461 1200
51 154 155 465 466 1200
51 154 155 465 466 1170
61 184 185 556 557 1470
78 235 236 711 712 1900
175 533 534 1612 1613 4300
112 340 341 1050 1051 2800
63 189 190 572 573 1530
45 134 135 406 407 1050
58 176 177 533 534 1400
53 160 161 500 501 1270
41 122 123 369 370 1000
61 181 182 560 561 1410
261 800 801 2400 2401 7200
276 813 814 2500 2501 7600
281 880 881 2600 2601 7200
361 1102 1103 3331 3332 10000
281 860 861 2600 2601 7400
271 850 851 2510 2511 7900
274 850 851 2531 2532 7800
271 850 851 2500 2501 7100
281 860 861 2600 2601 7400
302 950 951 2800 2801 8100
346 1060 1061 3203 3204 9700
401 1200 1201 3600 3601 11000
281 860 861 2600 2601 7400
354 1084 1085 3278 3279 8900
191 580 581 1730 1731 4800
381 1150 1151 3500 3501 10500
281 870 871 2600 2601 7300
263 804 805 2500 2501 7000
281 870 871 2600 2601 7300
371 1100 1101 3400 3401 10000
281 870 871 2600 2601 7200
351 1070 1071 3300 3301 8700
401 1200 1201 3600 3601 11000
351 1100 1101 3300 3301 10000
231 710 711 2120 2121 6500
376 1150 1151 3500 3501 10700
321 1000 1001 3000 3001 8100
378 1158 1159 3502 3503 10700
276 850 851 2530 2531 8000
281 860 861 2600 2601 8000
276 850 851 2530 2531 8000
281 860 861 2600 2601 7400
315 965 966 2918 2919 9000
276 850 851 2551 2552 7800
381 1200 1201 3500 3501 10700
131 400 401 1200 1201 3400
211 650 651 2000 2001 5400
213 660 661 2000 2001 5900
131 400 401 1200 1201 3100
242 750 751 2240 2241 6600
401 1200 1201 3700 3701 11000
184 562 563 1700 1701 4500
Part Number: 541B161AAG
August, 2012
SA47 SA48 SA50
Low High Low High Low
1321 2751 x x x
1911 4000 4001 8101 x
1901 4000 4001 8000 8001 12101
1751 3700 3701 7401 x
1201 2500 2501 5001 x
1201 2500 2501 5101 x
1171 2430 2431 4901 x
1471 3050 3051 6111 x
1901 4000 4001 8001 x
4301 9000 9001 18001 x
2801 5900 5901 11601 x
1531 3200 x x x
1051 2200 2201 4501 x
1401 2900 x x x
1271 2640 2641 5271 x
1001 2100 2101 4201 x
1411 3000 3001 6001 x
7201 15000 15001 30001 x
7601 15500 15501 31001 x
7201 15000 15001 30001 x
10001 21000 21001 42001 x
7401 15100 15101 31001 x
7901 16100 16101 33001 x
7801 16000 16001 32001 x
7101 14500 14501 29001 x
7401 15100 15101 30101 x
8101 17000 17001 34001 x
9701 20000 20001 40001 x
11001 23000 23001 46001 x
7401 15100 15101 30101 x
8901 18201 x x x
4801 10000 10001 20001 x
10501 22000 22001 44001 x
7301 15000 15001 30001 x
7001 14100 14101 28101 x
7301 15000 15001 30001 x
10001 21000 21001 43001 x
7201 15000 15001 30001 x
8701 18000 18001 36001 x
11001 23000 23001 46001 x
10001 21000 21001 42001 x
6501 13300 13301 27001 x
10701 22100 22101 45001 x
8101 17000 17001 34001 x
10701 22200 22201 45001 x
8001 16200 16201 33001 x
8001 16300 16301 33001 x
8001 16200 16201 33001 x
7401 15100 15101 30101 x
9001 18400 18401 37001 x
7801 16000 16001 32001 x
10701 22200 22201 45001 x
3401 7100 7101 14001 x
5401 11000 11001 22001 x
5901 12000 12001 24001 x
3101 6600 6601 13001 x
6601 13500 13501 27001 x
11001 23000 23001 47001 x
4501 9400 9401 18301 x
High
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x
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x
x
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x
x
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x
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