Position And Mount The Gf40/Gf80 Series - Brooks Instrument GF40 Serie Manual De Instalación Y Funcionamiento

Section 2 Installation
Brooks ® GF40/GF80 Series

2-12 Position and Mount the GF40/GF80 Series

2-6
It is recommended that the MFC is re-zeroed with process gas following the
recommended Brooks procedure (see zeroing bulletin FSB-001-0015 for
futher information).
If your GF40/GF80 Series is configured with downported fittings, follow
Steps 1 through 4 below. If your GF40/GF80 Series has in-line fittings (UNF,
RC, VCR, VCO, NPT, or tube compression), proceed to Step 5.
1. Refer to Figure 2-2. If downported fittings (1) are used, the GF40/GF80
Series is mounted to K1 Series substrate blocks (2) with four screws (3).
Metal C-seals (4) (as provided by integrator) are inserted between the
GF40/GF80 Series and substrate blocks before the screws are installed.
These metal seals must be replaced after each installation.
2. Select the mounting screws for downported devices. M4 screws are
used on 1.125" devices, K1S.
3. Refer to Figure 2-2. Insert the two mounting seals (4) over the gas flow
path of the K1 block. Carefully align the GF40/GF80 Series mounting
holes onto the K1 substrate blocks. Using your fingers, install the
screws through the GF40/GF80 Series fitting and hand tighten.
4. Using a torque wrench and a metric hex key, tighten the screws to the
torque value as described in Table 2-1 and the Torque Pattern in Figure
2-3.
5. If your GF40/GF80 Series is configured with in-line fittings, secure the
GF40/GF80 Series block to the gas panel with two, 8-32-UNC-2B"
screws. Then connect the inlet/ outlet fittings to the gas supply line
using two wrenches. Tighten the fittings to manufacturer recommenda-
tions.
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
August, 2012