Brooks Instrument GF40 Serie Manual De Instalación Y Funcionamiento página 27

Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
August, 2012
Figure 2-2 GF40/GF80 Series Mounted to K1 Series Substrate Blocks
Table 2-1 K1 Substrate Torque Data
Connection Torque Pattern
GF40/GF80 to Use a square pattern as
Subtstrate shown in Figure 2-4.
Start at 25 inch-pounds and
increase in increments of
10 inch-pounds until proper
value is obtained.
Figure 2-3 Mounting Screws Torque Pattern
Section 2 Installation
®
Brooks GF40/GF80 Series
Torque (Inch-Pounds)
K1S K1R2
45 45
3
1
4
2
K1H
45
2-7