Brooks Instrument GF40 Serie Manual De Instalación Y Funcionamiento página 41

Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
August, 2012
Table 4-2 GF40/GF80 Series Troubleshooting Guide (Continued)
Symptoms & Possible Causes
2. Flow out of range (Continuted).
Is the device zero correct?
3. No gas control; flow is at or
above maximum.
Is the gas pressure across the device
too high?
Are system valves open, or is the
purge input activated?
Is the setpoint correct for the
required flow?
4. No gas flow above some setpoint.
NOTE: When the setpoint is
increased beyond this point,
the GF40/GF80 Series signal remains at
some value lower than the set-point.
Is the gas inlet/outlet differential
pressure sufficient?
NOTE: If the pressure is too low,
the valve voltage to the
will be at its maximum output. This condition
will cause internal GF valve heating and
inability to properly reach desired flow setpoints.
Is the GF40/GF80 Series calibrated for the
gas flow?
GF40/GF80 Series
Section 4 Maintenance & Troubleshooting
Brooks
Corrective Action
Zero the device according to zeroing
procedure in Section 2-16. Verify leak check rates
are OK.
Verify that the pressure is correct for the gas and
range. If required, adjust inlet/outlet pressure to
achieve proper pressure reading.
Use tool software to verify.
Confirm that pin 12 is not connected to an active voltage
source.
Use tool software to verify.
Verify that the pressure is correct for
the gas and range. If required, adjust
regulator to achieve proper pressure.
Check GF40/GF80 Series side label. Run a flow check
to verify. If flow is incorrect, replace the
with a unit that is calibrated properly.
®
GF40/GF80 Series
GF40/GF80 Series
4-5