Brooks Instrument GF40 Serie Manual De Instalación Y Funcionamiento página 6

Contents
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Brooks GF40/GF80 Series
Appendix A: GF40/GF80 Series Gas Table .............................................................................................A-1
Appendix B: GF40/GF80 Series Patents ................................................................................................B-1
Appendix C: Essential Instructions ....................................................................................................... C-1
Warranty, Local Sales/Service Contact Information ....................................................................... Back Cover
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1-1 GF40/GF80 Series High Purity/Ultra-High Purity Digital Thermal Mass Flow Devices ................... 1-1
1-2 LED Display .................................................................................................................................. 1-4
1-3 Dimensions - GF40 Series ........................................................................................................... 1-10
1-4 Dimensions - GF80 Series ........................................................................................................... 1-11
2-1 Typical Gas Supply Arrangement ................................................................................................... 2-4
2-2 GF40/GF80 Series Mounted to K1 Series Substrate Blocks .......................................................... 2-7
2-3 Mounting Screws Torque Pattern ................................................................................................... 2-7
2-4 Zero Button Accessible at Top of Device ....................................................................................... 2-9
2-5 MultiFlo Cable Adapter .................................................................................................................. 2-10
2-6 RS-232/RS-485 Converter (P/N A33231) ..................................................................................... 2-11
2-7 Diagnostic Port ............................................................................................................................. 2-12
2-8 GF40/GF80 Series DeviceNet Connection and Pin-Outs .............................................................. 2-12
2-9 GF40/GF80 Series with 15-Pin Analog Connector and Pin-Outs .................................................. 2-13
2-10 GF40/GF80 Series Profibus Connections and Pin-Outs ............................................................... 2-14
2-11 GF40/GF80 Series EtherCAT Connections and Pin-Outs ............................................................. 2-14
3-1 GF40/GF80 Series Operating Principles ....................................................................................... 3-2
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Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
August, 2012
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