Brooks Instrument GF40 Serie Manual De Instalación Y Funcionamiento página 42

Section 4 Maintenance & Troubleshooting
Brooks ® GF40/GF80 Series
Table 4-2 GF40/GF80 Series Troubleshooting Guide (Continued)
Symptoms & Possible Causes
5. No gas flow below some setpoint.
NOTE: When the setpoint is
decreased below this point, the
GF40/GF80 Series signal remains at
some value higher than the
setpoint.
Is the gas inlet/outlet differential
pressure too high?
Is the GF40/GF80 Series leaking?
6. Gas flow oscillates.
Is the GF40/GF80
gas flowing?
Is there too much gas pressure
across the GF40/GF80
Are inlet and outlet pressures stable?
4-6
Series calibrated for the
Series?
Corrective Action
Verify that the pressure is correct for
regulator to achieve proper pressure.
Check for contamination. Test the GF40/GF80 Series
for leak integrity. Replace the
if leakage is detected.
Check the GF40/GF80 Series side can label. Run
a flow check to verify. If flow is incorrect,
replace the GF40/GF80 Series.
Verify that the pressure is correct for
this gas and range. If required, adjust
regulator to achieve proper pressure
reading.
If outlet pressure is unstable, check for
(no oscillation or hunting) a faulty vacuum pump,
or hunting at a downstream valve.
Check inlet pressure on tool. A faulty
pressure regulator can make the
GF40/GF80 Series appear to oscillate.
Adjust inlet pressure up or down by 2
psig increments until hunting disappears.
Verify common gas pressure is
within range.
NOTE: Hunting or oscillation can be
contributed to multiple GF40/GF80
a common gas manifold. Therefore,
inspect gas delivery sources to
the gas box (for example; two tools
sharing a common gas bottle and
calling for gas at the same time). Valve leak.
Unregulated gas pressure from Facilities.
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
August, 2012
GF40/GF80 Series
Series sharing