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Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
August, 2012
A GF40/GF80 Series Gas Table
Table A-1 GF40/GF80 Series Gas Table - Codes 1-99, Bins SA40 to SA43
Gas
Gas Symbol
Code
Gas Name
He
1
Helium
Ne
2
Neon
Ar
4
Argon
Kr
5
Krypton
Xe
6
Xenon
H2
7
Hydrogen
Air
8
Air
CO
9
Carbon Monoxide
HBr
10
Hydrogen Bromide
HCl
11
Hydrogen Chloride
N2
13
Nitrogen
D2
14
Deuterium
O2
15
Oxygen
NO
16
Nitric Oxide
HI
17
Hydrogen Iodide
F2
18
Fluorine
Cl2
19
Chlorine
H2S
22
Hydrogen Sulfide
H2Se
23
Hydrogen Selenide
CO2
25
Carbon Dioxide
N2O
27
Nitrous Oxide
CH4
28
Methane
NH3
29
Ammonia
PH3
31
Phosphine
SO2
32
Sulfur Dioxide
CH3F
33
Methyl Fluoride
COS
34
Carbonyl Sulfide
AsH3
35
Arsine
ClCN
37
Cyanogen Chloride
C2H4
38
Ethylene
SiH4
39
Silane
C2H2
42
Acetylene
GeH4
43
Germane
COF2
46
Carbonyl Fluoride
BF3
48
Boron Trifluoride
CHF3
49
Fluoroform (Freon-23)
NF3
53
Nitrogen Trifluoride
B2H6
58
Diborane
COCl2
60
Phosgene
PF3
62
Phosphorus Trifluoride
CF4
63
Carbon Tetrafluoride (Freon-14)
SiH2Cl2
67
Dichlorosilane
C3H6-b)
69
Propylene
BCl3
70
Boron Trichloride
ClO3F
72
Perchloryl Fluoride
ClF3
77
Chlorine Trifluoride
C2H7N
85
Dimethylamine
SiF4
88
Silicon Tetrafluoride
C3H8
89
Propane
C2F4
94
Tetrafluoroethylene
Si2H6
97
DISILANE
GeF4
99
Germanium Tetrafluoride
For reference only, consult factory on the latest tables.
Min inlet pressure for vac.
exhaust (PSIA)
Elastomer seal
SA40-
GF040
SA47
SA48
SA50
Viton
19.7
24.7
29.7
Viton
24.7
Viton
24.7
29.7
44.7
Viton
29.7
Viton
24.7
Viton
14.7
14.7
19.7
Viton
24.7
29.7
Viton
24.7
29.7
Viton
24.7
EPDM
24.7
40.0
Viton
24.7
29.7
32.7
Viton
14.7
14.7
Viton
24.7
29.7
34.7
Viton,Kalrez
24.7
29.7
Kalrez
24.7
29.7
-
24.7
29.7
Viton
24.7
29.7
Kalrez
24.7
29.7
Kalrez
24.7
29.7
Buna
24.7
29.7
29.7
Viton,Buna
24.7
29.7
29.7
Viton,Buna
24.7
24.7
29.7
Neoprene,EPDM
24.7
24.7
29.7
Kalrez
19.7
24.7
EPDM
19.7
24.7
Viton
24.7
29.7
Viton
24.7
29.7
Kalrez
24.7
29.7
Kalrez
14.7
21.7
Viton
24.7
29.7
Kalrez
24.7
29.7
Viton
16.7
19.7
-
24.7
29.7
Viton
19.7
19.7
21.7
Kalrez
19.7
24.7
Viton,Kalrez
24.7
24.7
26.7
Teflon
24.7
29.7
26.7
Kalrez
19.7
19.7
Kalrez
12.7
14.7
-
19.7
24.7
Viton
24.7
24.7
26.7
Kalrez
14.7
19.7
Viton
19.7
19.7
Kalrez
11.7
14.7
-
14.7
20.7
Kalrez
14.7
20.7
Viton,Kalrez
9.7
14.7
-
19.7
24.7
Viton
9.7
11.7
Viton,Buna
19.7
19.7
-
19.7
19.7
-
20.7
24.7
Appendix A: GF40/GF80 Series Gas Table
®
Brooks
Min inlet pressure for atm.
exhaust (PSIA)
SA40
SA40-
SA47
SA48
SA50
Low
High
21.3
25.1
29.7
5
14
25.1
14.7
5
14
25.1
29.7
44.7
5
14
29.7
4
11
25.1
3
6
18.4
18.4
21.3
3
10
25.1
29.7
3
10
25.1
29.7
3
10
25.1
3
8
25.1
40.0
3
10
25.1
29.7
32.7
3
10
18.4
18.4
3
10
25.1
29.7
34.7
3
10
25.1
29.7
3
10
25.1
29.7
3
5
25.1
29.7
3
9
25.1
29.7
3
6
25.1
29.7
3
8
25.1
29.7
3
7
25.1
29.7
29.7
3
7
25.1
29.7
29.7
3
7
25.1
25.1
29.7
3
8
25.1
25.1
29.7
3
8
21.3
25.1
3
7
21.3
25.1
3
6
25.1
29.7
3
7
25.1
29.7
3
7
25.1
29.7
3
6
18.4
22.7
3
5
25.1
29.7
3
6
25.1
29.7
3
6
19.4
21.3
3
6
25.1
29.7
3
6
21.3
21.3
22.7
3
5
21.3
25.1
3
5
25.1
25.1
26.8
3
5
25.1
29.7
26.8
3
5
21.3
21.3
3
4
17.4
18.4
3
3
21.3
25.1
3
4
25.1
25.1
26.8
3
4
18.4
21.3
3
3
21.3
21.3
3
4
17.0
18.4
3
3
18.4
22.0
3
4
18.4
22.0
3
4
16.3
18.4
3
3
21.3
25.1
3
4
16.3
17.0
3
3
21.3
21.3
3
3
21.3
21.3
3
3
22.0
25.1
3
3
GF40/GF80 Series
SA41
SA42
SA43
Low
High
Low
High
Low
High
15
42
43
128
129
400
15
42
43
129
130
400
15
42
43
130
131
400
12
32
33
100
101
300
7
19
20
58
59
178
11
30
31
92
93
280
11
30
31
92
93
280
11
30
31
92
93
280
9
25
26
77
78
235
11
30
31
92
93
280
11
30
31
92
93
280
11
30
31
94
95
280
11
30
31
92
93
280
11
30
31
92
93
280
6
15
16
46
47
141
10
27
28
83
84
254
7
19
20
57
58
173
9
25
26
76
77
232
8
22
23
66
67
202
8
22
23
69
70
209
8
21
22
65
66
200
9
23
24
71
72
215
9
24
25
73
74
223
8
22
23
67
68
205
7
17
18
52
53
157
8
22
23
67
68
204
8
20
21
60
61
183
7
18
19
55
56
170
6
15
16
46
47
142
7
17
18
54
55
163
7
18
19
56
57
170
7
18
19
57
58
170
7
17
18
53
54
161
6
17
18
53
54
160
6
16
17
50
51
150
6
16
17
48
49
145
6
15
16
46
47
140
5
12
13
38
39
116
4
11
12
35
36
106
5
14
15
42
43
129
5
13
14
40
41
121
4
10
11
29
30
5
12
13
36
37
110
4
10
11
31
32
5
12
13
38
39
114
5
11
12
35
36
107
4
11
12
34
35
101
5
11
12
34
35
103
4
10
11
32
33
100
4
10
11
31
32
100
4
10
11
30
31
4
10
11
30
31
89
94
92
92
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