Flow Controller Installation Arrangement; Typical Gas Supply Arrangement - Brooks Instrument GF40 Serie Manual De Instalación Y Funcionamiento

Section 2 Installation
Brooks ® GF40/GF80 Series

2-10 Flow Controller Installation Arrangement

2-4
Typical gas supply arrangements are shown in Figure 2-1. GF40s/GF80s
are often arranged inside a gas panel. Configure standard configurations
("SAs") or "blanks" for a variety of pure gases and mixtures. As a result,
MultiFlo technology enables the user to reduce unique inventory
requirements.
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1
1. Gas Source
2. Regulated Gas Supply
3. Point of Use (POU) Regulator
4 . Filter
5. Upstream Shut-Off Valve
Figure 2-1 Typical Gas Supply Arrangement
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
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5
6. GF40 or GF80
7. Downstream Shut-Off Valve
8. Tool
9. Vacuum Pump
August, 2012
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