Technical Information
Scroll Pump Description
The TPS-compact internal scroll creates vacuum using a simple dual scroll
mechanism in which one of the nested scrolls orbits about the other, creating
moving zones of captured gas.
Gas enters the scroll set at the perimeter and is displaced and compressed toward
the center hub where it is exhausted.
Figure 39
Scroll Pump exhaust connection: To avoid overheating the Scroll
CAUTION!
pump, do not restrict the exhaust flow with long lengths of small
diameter tubing.
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Agilent TPS-compact User Manual