Description Of The Vacion Plus 800; Technical Information - Agilent Technologies VacIon Plus 800 Manual Del Usuario

Technical Information

Description of the VacIon Plus 800

The Agilent VacIon Plus 800 pumps are ion pumps equipped with Starcell elements
and are available in two flange versions:
10" (X3607-64200): inlet flange CFF 10", equipped with one Fischer

feedthrough; heaters (not mounted) can be provided separately as accessory.
8" (X3607-64203): inlet flange CFF 8", equipped with one Fischer feedthrough;

heaters (not mounted) can be provided separately as accessory.
Different heater configurations are available. Please contact the local Agilent
representative for reference.
VacIon Plus 800 pumps are designed to operate in the pressure range from the
recommended maximum starting pressure (1E-4 mbar for StarCell) to the ultimate
pressure (below 1E-11 mbar). As pointed out in the paragraph "Use", the ion pump
can in principle also be started at higher pressure, but this prolonged practice can
affect the pump lifetime. Moreover, it is worth noticing that there is not in theory a
limit to the achievable ultimate pressure, but the measurement of pressures below
1E-11 mbar (in the eXtreme High Vacuum - XHV - range) by means of a gauge is
very difficult, due to the intrinsic limitations of the gauge itself. Moreover, the
achievement of the ultimate pressure strongly depends on how efficiently the
bakeout of the complete system is performed.
Virtually all gases and vapors can be pumped successfully with the ion pump. The
pumping speed will vary depending on the system pressure, the gas type and the
applied operating voltage. The latter can be optimized using Agilent controllers, in
order to always feed the pump at the voltage for which the pumping speed is
maximized.
This pump, equipped with Starcell elements, is ideal for the pumping of noble (or
inert) gases.
The StarCell is the best-in-class solution for pumping noble gases. It is the latest
variation of a triode configuration. Thanks to its engineered design, StarCell pumps
can handle a very high amount of noble gases (better than Noble Diode type pumps
– one order of magnitude more) and hydrogen (comparable to the Diode).
210 Agilent VacIon Plus 800 User Manual