Event
Possible cause
10257
Monitoring pressure gradient during
evacuation in the vacuum test. The pressure
change at pressure sensor S1 is too low
during evacuation.
10266
Pressure-controlled evacuation. The
pressure change is less than expected; the
vacuum performance is decreasing.
What you can do
Please check the dust filter for contamination
and replace it if necessary.
The intake area of the cooling system under
the device must be free; check for paper or
similar items underneath the device which
could stop the air flow.
Please ensure that the device is sufficiently
ventilated. Heat dissipation must be able to
take place freely, ensure ventilation;
conversion cabinets are not recommended.
Please observe the set-up conditions (e.g.
ambient temperature).
Check the loading of the device for
compliance with the permissible loading
quantities.
Check the pressure release filter in the
chamber for blockage.
Please check the dust filter for contamination
and replace it if necessary.
The intake area of the cooling system under
the device must be free; check for paper or
similar items underneath the device which
could stop the air flow.
Please ensure that the device is sufficiently
ventilated. Heat dissipation must be able to
take place freely, ensure ventilation;
conversion cabinets are not recommended.
Please observe the set-up conditions (e.g.
ambient temperature).
Check the loading of the device for
compliance with the permissible loading
quantities.
Check the pressure release filter in the
chamber for blockage.
This is only a warning. The reprocessing
result is not affected. You can continue to
use the device.
14 Malfunctions
63