安全性 ......................................................................................................................................... 4
1
残留リスク ....................................................................................................................................................... 4
1.1
事業者への注意事項と義務 .............................................................................................................................. 5
1.2
許可されない作動条件 ...................................................................................................................................... 6
1.3
放出 .................................................................................................................................................................. 6
1.4
装置の説明 ..................................................................................................................................................................... 7
2
正しくお使いいただくために ........................................................................................................................... 7
2.1
供給範囲 ........................................................................................................................................................... 7
2.2
装置の説明 ....................................................................................................................................................... 8
2.3
接続ケーブルの割り当て ................................................................................................................................ 10
2.4
テクニカルデータ ........................................................................................................................................................ 12
3
輸送/保管 ................................................................................................................................................................... 12
4
設置 .............................................................................................................................................................................. 13
5
開梱 ................................................................................................................................................................ 13
5.1
設置前提条件 .................................................................................................................................................. 13
5.2
コンポーネントの位置決め ............................................................................................................................ 14
5.3
コンポーネントの取り付け ............................................................................................................................ 15
5.4
ガス供給の接続 .............................................................................................................................................. 18
5.5
デジタル I/O 通信機器の接続 ......................................................................................................................... 18
5.6
CAN バス通信機器(場合によっては複数)の接続........................................................................................ 19
5.7
モジュールキャリアの調整 ............................................................................................................................ 20
5.8
複数の装置の設置 ........................................................................................................................................... 23
5.9
プラズマプロセス使用時における特記事項 ................................................................................................................. 24
6
一般的な説明 .................................................................................................................................................. 24
6.1
表面処理の実施 .............................................................................................................................................. 25
6.2
表面処理後の処置 ........................................................................................................................................... 25
6.3
操作 .............................................................................................................................................................................. 26
7
ドライバー筐体の LED 表示 ........................................................................................................................... 26
7.1
スイッチング信号 ........................................................................................................................................... 26
7.2
異常の解消 ..................................................................................................................................................... 27
7.3
交換モジュールの挿入/取り外し .................................................................................................................. 27
7.4
デジタル I/O 通信機器のセットアップ ........................................................................................................... 29
7.5
エラーモードの切り替え ................................................................................................................................ 30
7.6
CAN バス通信機器(場合によっては複数)のセットアップ ......................................................................... 31
7.7
CANopen オブジェクトディクショナリ ......................................................................................................... 31
7.8
交換モジュール「標準」タイプでの作業 ....................................................................................................... 32
7.9
交換モジュール「近接」タイプでの作業 ....................................................................................................... 32
7.10
その他の交換モジュールでの作業 .................................................................................................................. 32
7.11
使用終了 ...................................................................................................................................................................... 33
8
保守 .............................................................................................................................................................................. 33
9
清掃 ................................................................................................................................................................ 33
9.1
交換モジュールを交換する ............................................................................................................................ 33
9.2
障害の解消 ................................................................................................................................................................... 34
10
環境 .............................................................................................................................................................................. 35
11
廃棄 ................................................................................................................................................................ 35
11.1
仕様適合/規格 .............................................................................................................................................................. 35
12
12.1
CE .................................................................................................................................................................. 35
12.2
FCC ................................................................................................................................................................ 35
交換部品 ...................................................................................................................................................................... 36
13
オプションの付属品..................................................................................................................................................... 36
14
BA-PZ3_i_ML / F0354901
3